@article{virgilio:hal-03560465, TITLE = {{Acoustic Characterization of Patterning Degradation during Wet Etching}}, AUTHOR = {Virgilio, Christophe and Garnier, Philippe and Foucaud, Mathieu and Devos, Arnaud and Pinceau, David and Carlier, Julien and Campistron, Pierre and Nongaillard, Bertrand and Neyens, Marc and Broussous, Lucile}, URL = {https://uphf.hal.science/hal-03560465}, JOURNAL = {{ECS Transactions}}, PUBLISHER = {{Electrochemical Society, Inc.}}, VOLUME = {69}, NUMBER = {8}, PAGES = {185-190}, YEAR = {2015}, MONTH = Oct, DOI = {10.1149/06908.0185ecst}, HAL_ID = {hal-03560465}, HAL_VERSION = {v1}, }