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Poster Communications Year : 2019

High voltage excitation and nonlinear transmission of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer

Abstract

This paper reports a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer (PMUT) under high voltage excitation. The proposed PMUT array consists of 44x39 elements fabricated on a silicon-on-insulator (SOI) substrate with 1 μm AlN film on 5 μm silicon membrane. The electrical impedance was 11.6-j30 Ohm at 15.8 MHz resonant frequency in air and 4.72-j25 Ohm at 13.9 MHz when water charged. The LDV measurements showed that the transmission efficiency and the bandwidth for free vibration were 1.7 nm/V and 2.1%, respectively. Nonlinear behavior was observed when increasing the burst amplitude. This strategy is potentially applied to CMOS-compatible high-resolution ultrasonography
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Dates and versions

hal-03591183 , version 1 (28-02-2022)

Identifiers

  • HAL Id : hal-03591183 , version 1

Cite

Wen-Juan Liu. High voltage excitation and nonlinear transmission of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer. 10ème Edition Franco-Belge du Mardi des Chercheurs, MdC 2019, Mar 2019, Mons, Belgium. . ⟨hal-03591183⟩
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