[Invited] LbL based PEDOT:PSS microactuators and microsensors
Résumé
Conducting polymers (CPs) are functional materials that respond to external electrical stimulus and are able to generate reversible contraction and expansion which leads to changing the shape or the size of these materials. They are soft, lightweight, easily processed and manufactured which has made them attractive for actuator and sensor applications. The integration of electrical contacts to microfabricate self-standing microsystems has been a stumbling block in this field. The two distinct steps in realization of a microdevice are the optimization of the materials and finally the fabrication of a device. Microfabrication could enable a broad range of applications, but large strains and forces of these materials are essential to involve them in microelectromechanical systems (MEMS) or soft robotics. This work grounds on microfabrication of devices based on conducting interpenetrating polymer network (C-IPN) architecture and on their electromechanical characterization as microactuators and microsensors. The optimization of materials has been carried out with poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) based actuators, which were fabricated with Layer-by-Layer (LbL) process and micropatterned via laser ablation technique. The second part of the work describes the fabrication of self-standing PEDOT:PSS microdevices with two integrated electrical contacts