Micro-transducers matrix design for structural health monitoring
Résumé
In this work, a two-dimensional (2D) Lithium Niobate (LiNbO3) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pattern. In contrary to the one element case, this μTs matrix allows to automatically scan a desired structure in real time without performing any mechanical scanning. The μTs matrix is characterized using an impedance analyser. The results shows that the matrix can detect ultrasonic guided waves in the low frequency range (less than 1 MHz).