Development of SAW-IDT MEMS Sensors for characterization of superficial residual stresses gradient - Archive ouverte HAL Access content directly
Poster Communications Year :

Development of SAW-IDT MEMS Sensors for characterization of superficial residual stresses gradient

(1) , (1) , (1) , , (1) , (1)
1
Not file

Dates and versions

hal-03675937 , version 1 (23-05-2022)

Identifiers

  • HAL Id : hal-03675937 , version 1

Cite

Marc Duquennoy, Mohammadi Ouaftouh, Julien Deboucq, J.E. Lefebvre, Frédéric Jenot, et al.. Development of SAW-IDT MEMS Sensors for characterization of superficial residual stresses gradient. Symposium on Piezoelectric Micro and Nano Structures and their Applications, Sep 2014, Blois, France. ⟨hal-03675937⟩
7 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More